Welcome to Micro Vacuum Device Lab!

We have been devoted to fabricating vacuum electronic devices with micro-nano fabrication technology to realize on-chip miniature vacuum electronic devices. As conventional vacuum electronic devices in the form of metal or glass tubes with thermionic cathodes suffer from large size, high expense and poor uniformity, the use of microfabrication technology can realize smaller size, lower cost and convenience of integration. Our lab are focusing on developing on-chip miniature electron source and on-chip vacuum cavity package to realize various chip-scale vacuum electronic devices and their wafer-scale fabrication, in the hope of their widespread use in security, healthcare, industry and scientific instruments.