Group News

• Wafer-Scale Fabricated MEMS-type Ionization Vacuum Sensors Based on Through Glass Via Technology

    December 16, 2024  We report a MEMS ionization vacuum sensor with 4-inch wafer-level fabrication.

• An on-chip vacuum triode based on thermionic electron emission from super-aligned carbon nanotube films

    September 19, 2024  An on-chip vacuum triode based on thermionic electron emission from suspended super-aligned carbon nanotube films is realized by microfabrication technology.

• Wafer-scale fabricated on-chip thermionic electron sources based on a suspended $\mathrm{Y_2O_3}$/$\mathrm{TiN}$ filament

    September 18, 2024  We report a new on-chip electron source based on thermionic electron emission from a suspended $\mathrm{Y_2O_3}$/$\mathrm{TiN}$ filament.

• Participated in the 27th International Vacuum Nanoelectronics Conference (IVNC)

    July 20, 2024  Professor Wei led his research team to participate in the 37th International Vacuum Nanoelectronics Conference in the Czech Republic from July 15th to 19th, 2024.

• Congratulations to doctoral student Fangyuan Zhan on graduating successfully

    July 1, 2024  Doctoral student Fangyuan Zhan has graduated successfully and obtained a Doctor of Science degree.

• Participated in the 51st IEEE International Conference on Plasma Science (ICOPS)

    June 25, 2024  Our research group participated in the 51st IEEE International Plasma Science Conference from June 16th to 20th, 2024 at the Beijing International Conference Center.

• Attending The 22nd Annual Meeting of the Vacuum Electronics Division of the Chinese Institute of Electronics (CIE)

    May 13, 2024  Professor Xianlong Wei led the group to attend the 22nd Annual Meeting of the Vacuum Electronics Division of the Chinese Institute of Electronics (CIE) in Guangzhou, China on May 8-11, 2024.

• A MEMS-Type Ionization Vacuum Sensor with a Wide Measurement Range

    March 22, 2024  We develop a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source.

• A Vacuum Transistor Based on Electron Emission From SiOₓ Tunneling Diodes

    March 22, 2024  We report an on-chip vacuum transistor based on electron emission from SiOx tunneling junctions formed at the side surface of a thin SiOx film.

• Large and Pressure-dependent c-Axis Piezoresistivity of Highly Oriented Pyrolytic Graphite near Zero Pressure

    March 22, 2024  A new method for studying the c-axis piezoresistivity of van der Waals materials near zero pressure is developed based on in-situ scanning electron microscope and finite element simulation.