Welcome to Micro Vacuum Device Lab!
We have been devoted to fabricating vacuum electronic devices with micro-nano fabrication technology technology to realize on-chip miniature vacuum electronic devices. As conventional vacuum electronic devices in the form of metal or glass tubes with thermionic cathodes suffer from large size, high expense and poor uniformity, the use of microfabrication technology can realize smaller size, lower cost and convenience of integration. Our lab are focusing on developing on-chip miniature electron source and on-chip vacuum cavity package to realize various chip-scale vacuum electronic devices and their wafer-scale fabrication, in the hope of their widespread use in security, healthcare, industry and scientific instruments.
Recent Publications
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Participated in the 27th International Vacuum Nanoelectronics Conference (IVNC)
July 20, 2024 Professor Wei led his research team to participate in the 37th International Vacuum Nanoelectronics Conference in the Czech Republic from July 15th to 19th, 2024. -
Congratulations to doctoral student Fangyuan Zhan on graduating successfully
July 1, 2024 Doctoral student Fangyuan Zhan has graduated successfully and obtained a Doctor of Science degree. -
Participated in the 51st IEEE International Conference on Plasma Science (ICOPS)
June 25, 2024 Our research group participated in the 51st IEEE International Plasma Science Conference from June 16th to 20th, 2024 at the Beijing International Conference Center. -
Attending The 22nd Annual Meeting of the Vacuum Electronics Division of the Chinese Institute of Electronics (CIE)
May 13, 2024 Professor Xianlong Wei led the group to attend the 22nd Annual Meeting of the Vacuum Electronics Division of the Chinese Institute of Electronics (CIE) in Guangzhou, China on May 8-11, 2024. -
Micro-Pirani Pressure Sensor With Operation Range Beyond Atmospheric Pressure Based on Aligned Carbon Nanotube Films
March 22, 2024 We report a miniature Pirani sensor based on super-aligned CNT films and it has an upper operating limit capable of expanding to several atmospheres.