Welcome to Micro Vacuum Device Lab!
We have been devoted to fabricating vacuum electronic devices with micro-nano fabrication technology technology to realize on-chip miniature vacuum electronic devices. As conventional vacuum electronic devices in the form of metal or glass tubes with thermionic cathodes suffer from large size, high expense and poor uniformity, the use of microfabrication technology can realize smaller size, lower cost and convenience of integration. Our lab are focusing on developing on-chip miniature electron source and on-chip vacuum cavity package to realize various chip-scale vacuum electronic devices and their wafer-scale fabrication, in the hope of their widespread use in security, healthcare, industry and scientific instruments.
Recent Publications
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Congratulations to doctoral students Yidan He and Yanqing Zhao on graduating successfully
July 1, 2025 Doctoral students Yidan He and Yanqing Zhao have graduated successfully and obtained a Doctor of Science degree. -
Thermionic Electron Sources Based on Microscale Tungsten Filaments on a Glass Wafer
June 8, 2025 We report a Thermionic Electron Sources based on microscale tungsten filaments on a glass wafer. -
Wafer-Scale Fabricated MEMS-type Ionization Vacuum Sensors Based on Through Glass Via Technology
December 16, 2024 We report a MEMS ionization vacuum sensor with 4-inch wafer-level fabrication. -
An on-chip vacuum triode based on thermionic electron emission from super-aligned carbon nanotube films
September 19, 2024 An on-chip vacuum triode based on thermionic electron emission from suspended super-aligned carbon nanotube films is realized by microfabrication technology. -
Wafer-scale fabricated on-chip thermionic electron sources based on a suspended $\mathrm{Y_2O_3}$/$\mathrm{TiN}$ filament
September 18, 2024 We report a new on-chip electron source based on thermionic electron emission from a suspended $\mathrm{Y_2O_3}$/$\mathrm{TiN}$ filament.